Mechanics of Microelelectromechanical Systems


  • Author: Nicolae Lobontiu , Ephrahim Garcia
  • Publisher: Springer India
  • ISBN-13: 9788181288493
  • Pages: 420
  • Binding: Paperback
  • Year of Pub / Reprint Year: 2005

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About The Book

This Book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a Mechanical engineer’s viewpoint as Devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an External stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the Perception that such an approach might contribute to a more Solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and Designing reliableand desirably-optimized Microsystems.


1. Stiffness Basics
2. Microcantilevers
3. Microhinges
4. Microbridges
5. Microsuspensions
6. Microtransduction : Actuation and Sensing
7. Static Response of MHMS
8. Microfabrication
9. Materials
10. Precision and Scaling